EUV optical characterization of alternative membrane materials

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Authors
Scholze, Frank; Laubis, Christian; Krumrey, Michael; Timmermans, Marina; Pollentier, Ivan; Gallagher, Emily
DOI
10.1117/12.2280553
Conference
Photomask Technology
Title
EUV optical characterization of alternative membrane materials
Publication type
Proceedings paper
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