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EUV optical characterization of alternative membrane materials

dc.contributor.authorScholze, Frank
dc.contributor.authorLaubis, Christian
dc.contributor.authorKrumrey, Michael
dc.contributor.authorTimmermans, Marina
dc.contributor.authorPollentier, Ivan
dc.contributor.authorGallagher, Emily
dc.date.accessioned2021-10-24T13:04:09Z
dc.date.available2021-10-24T13:04:09Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29391
dc.sourceIIOimport
dc.titleEUV optical characterization of alternative membrane materials
dc.typeProceedings paper
dc.contributor.imecauthorTimmermans, Marina
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorGallagher, Emily
dc.contributor.orcidimecTimmermans, Marina::0000-0001-9805-8259
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.identifier.doi10.1117/12.2280553
dc.source.peerreviewyes
dc.source.beginpage104510R
dc.source.conferencePhotomask Technology
dc.source.conferencedate11/09/2017
dc.source.conferencelocationMonterey, CA USA
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 10451


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