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BEOL compatible WS2 transistors fully fabricated in a 300 mm pilot line

dc.contributor.authorSchram, Tom
dc.contributor.authorSmets, Quentin
dc.contributor.authorHeyne, Markus
dc.contributor.authorGroven, Benjamin
dc.contributor.authorKunnen, Eddy
dc.contributor.authorThiam, Arame
dc.contributor.authorDevriendt, Katia
dc.contributor.authorDelabie, Annelies
dc.contributor.authorLin, Dennis
dc.contributor.authorChiappe, Daniele
dc.contributor.authorAsselberghs, Inge
dc.contributor.authorLux, Marcel
dc.contributor.authorBrus, Stephan
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorSayan, Safak
dc.contributor.authorJuncker, Aurélie
dc.contributor.authorCaymax, Matty
dc.contributor.authorRadu, Iuliana
dc.date.accessioned2021-10-24T13:05:52Z
dc.date.available2021-10-24T13:05:52Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29393
dc.sourceIIOimport
dc.titleBEOL compatible WS2 transistors fully fabricated in a 300 mm pilot line
dc.typeProceedings paper
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorSmets, Quentin
dc.contributor.imecauthorGroven, Benjamin
dc.contributor.imecauthorThiam, Arame
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorAsselberghs, Inge
dc.contributor.imecauthorLux, Marcel
dc.contributor.imecauthorBrus, Stephan
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.orcidimecSchram, Tom::0000-0003-1533-7055
dc.contributor.orcidimecSmets, Quentin::0000-0002-2356-5915
dc.contributor.orcidimecGroven, Benjamin::0000-0002-5781-7594
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage139
dc.source.endpage140
dc.source.conferenceSilicon Nanoelectronics Workshop - SNW
dc.source.conferencedate4/07/2017
dc.source.conferencelocationKyoto Japan
dc.identifier.urlhttp://ieeexplore.ieee.org/document/8242336
imec.availabilityPublished - open access


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