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Impact of the metal gate on the oxide stack quality assessed by low-frequency noise
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Impact of the metal gate on the oxide stack quality assessed by low-frequency noise
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Date
2017
Proceedings Paper
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35760.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Simoen, Eddy
;
He, Liang
;
O'Sullivan, Barry
;
Veloso, Anabela
;
Horiguchi, Naoto
;
Collaert, Nadine
;
Claeys, Cor
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1915
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Acq. date: 2025-12-12
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1915
since deposited on 2021-10-24
1
last month
Acq. date: 2025-12-12
Citations