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Microfluidics on 200mm quartz substrate using semiconductor fab dry etch process as an enabler for imaging applications in life sciences
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Authors
Stassen, Andim
;
Fiorentino, Giuseppe
;
Jones, Ben
;
Stahl, Richard
;
Dupont, Tania
;
Vrancken, Evi
;
Humbert, Aurelie
;
Severi, Simone
;
Wood, Alex
;
Worster, Will
;
Riddell, Kevin
;
Ashraf, Huma
;
Thomas, Dave
Conference
Micro Nano Engineering 2017
Title
Microfluidics on 200mm quartz substrate using semiconductor fab dry etch process as an enabler for imaging applications in life sciences
Publication type
Meeting abstract
Embargo date
9999-12-31
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