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Stress engineered AlN/AlGaN superlattices as high-voltage current blocking layers on 200 mm Silicon
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Authors
Su, Jie
;
Liang, Hu
;
Posthuma, Niels
;
Wellekens, Dirk
;
Decoutere, Stefaan
;
Lee, Soo Min
;
Paranjpe, Ajit
Conference
59th Electronic Materials Conference
Title
Stress engineered AlN/AlGaN superlattices as high-voltage current blocking layers on 200 mm Silicon
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