dc.contributor.author | Subirats, Alexandre | |
dc.contributor.author | Arreghini, Antonio | |
dc.contributor.author | Breuil, Laurent | |
dc.contributor.author | Degraeve, Robin | |
dc.contributor.author | Van den Bosch, Geert | |
dc.contributor.author | Linten, Dimitri | |
dc.contributor.author | Furnemont, Arnaud | |
dc.date.accessioned | 2021-10-24T14:24:03Z | |
dc.date.available | 2021-10-24T14:24:03Z | |
dc.date.issued | 2017 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/29519 | |
dc.source | IIOimport | |
dc.title | Impact of discrete trapping in high pressure deuterium annealed and doped poly-Si channel 3D NAND macaroni | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Arreghini, Antonio | |
dc.contributor.imecauthor | Breuil, Laurent | |
dc.contributor.imecauthor | Degraeve, Robin | |
dc.contributor.imecauthor | Van den Bosch, Geert | |
dc.contributor.imecauthor | Linten, Dimitri | |
dc.contributor.imecauthor | Furnemont, Arnaud | |
dc.contributor.orcidimec | Arreghini, Antonio::0000-0002-7493-9681 | |
dc.contributor.orcidimec | Breuil, Laurent::0000-0003-2869-1651 | |
dc.contributor.orcidimec | Van den Bosch, Geert::0000-0001-9971-6954 | |
dc.contributor.orcidimec | Linten, Dimitri::0000-0001-8434-1838 | |
dc.contributor.orcidimec | Furnemont, Arnaud::0000-0002-6378-1030 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 5A-2.1 | |
dc.source.endpage | 5A-2.6 | |
dc.source.conference | IEEE International Reliability Physics Symposium - IRPS | |
dc.source.conferencedate | 2/04/2017 | |
dc.source.conferencelocation | Monterey, CA USA | |
dc.identifier.url | http://ieeexplore.ieee.org/document/7936319/ | |
imec.availability | Published - open access | |