Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Conference contributions
View item
imec Publications Repository
imec Publications
Conference contributions
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Impact of discrete trapping in high pressure deuterium annealed and doped poly-Si channel 3D NAND macaroni
View/
open
34869.pdf (379.9Kb)
Metadata
Show full item record
Authors
Subirats, Alexandre
;
Arreghini, Antonio
;
Breuil, Laurent
;
Degraeve, Robin
;
Van den Bosch, Geert
;
Linten, Dimitri
;
Furnemont, Arnaud
Conference
IEEE International Reliability Physics Symposium - IRPS
Title
Impact of discrete trapping in high pressure deuterium annealed and doped poly-Si channel 3D NAND macaroni
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections
Conference contributions
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login