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Impact of discrete trapping in high pressure deuterium annealed and doped poly-Si channel 3D NAND macaroni
Publication:
Impact of discrete trapping in high pressure deuterium annealed and doped poly-Si channel 3D NAND macaroni
Date
2017
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Subirats, Alexandre
;
Arreghini, Antonio
;
Breuil, Laurent
;
Degraeve, Robin
;
Van den Bosch, Geert
;
Linten, Dimitri
;
Furnemont, Arnaud
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1901
since deposited on 2021-10-24
Acq. date: 2025-10-23
Citations
Metrics
Views
1901
since deposited on 2021-10-24
Acq. date: 2025-10-23
Citations