Publication:

Impact of discrete trapping in high pressure deuterium annealed and doped poly-Si channel 3D NAND macaroni

Date

2017
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorSubirats, Alexandre
dc.contributor.authorArreghini, Antonio
dc.contributor.authorBreuil, Laurent
dc.contributor.authorDegraeve, Robin
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorLinten, Dimitri
dc.contributor.authorFurnemont, Arnaud
dc.contributor.imecauthorArreghini, Antonio
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorFurnemont, Arnaud
dc.contributor.orcidimecArreghini, Antonio::0000-0002-7493-9681
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecFurnemont, Arnaud::0000-0002-6378-1030
dc.date.accessioned2021-10-24T14:24:03Z
dc.date.available2021-10-24T14:24:03Z
dc.date.embargo9999-12-31
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29519
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7936319/
dc.source.beginpage5A-2.1
dc.source.conferenceIEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate2/04/2017
dc.source.conferencelocationMonterey, CA USA
dc.source.endpage5A-2.6
dc.title

Impact of discrete trapping in high pressure deuterium annealed and doped poly-Si channel 3D NAND macaroni

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
34869.pdf
Size:
379.98 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions