Authors

Subirats, Alexandre; Arreghini, Antonio; Breuil, Laurent; Degraeve, Robin; Van den Bosch, Geert; Linten, Dimitri; Furnemont, Arnaud

Conference

International Workshop on Characterization and Modeling of Memory Devices - IWCM2

Title

Channel and gate stack charge trapping investigation in vertical 3D NAND devices with poly-silicon channel

Publication type

Proceedings paper