Authors

Subirats, Alexandre; Arreghini, Antonio; Capogreco, Elena; Delhougne, Romain; Tan, Chi Lim; Hikavyy, Andriy; Breuil, Laurent; Degraeve, Robin; Putcha, Vamsi; Van den Bosch, Geert; Linten, Dimitri; Furnemont, Arnaud

Conference

IEEE International Electron Devices Meeting - IEDM

Title

Experimental and theoretical verification of channel conductivity degradation due to grain boundaries and defects in 3D NAND

Publication type

Proceedings paper

Embargo date

9999-12-31