Publication:

Optimization and upscaling of spin coating with organosilane monolayers for low-k pore sealing

Date

2017

Journal article

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Author(s)

;

Romo Negreira, Ainhoa

;

Meersschaut, Johan

;

;

;

Conard, Thierry

;

Struyf, Herbert

;

;

Boemmels, Juergen

;

Moinpour, Mansour

;

De Feyter, Steven

;

Journal

Microelectronic Engineering

Statistics

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Acq. date: 2026-08-08