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Optimization and upscaling of spin coating with organosilane monolayers for low-k pore sealing
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Authors
Sun, Yiting
;
Romo Negreira, Ainhoa
;
Meersschaut, Johan
;
Hoflijk, Ilse
;
Vaesen, Inge
;
Conard, Thierry
;
Struyf, Herbert
;
Tokei, Zsolt
;
Boemmels, Juergen
;
Moinpour, Mansour
;
De Feyter, Steven
;
Armini, Silvia
ISSN
0167-9317
Journal
Microelectronic Engineering
Volume
137
Title
Optimization and upscaling of spin coating with organosilane monolayers for low-k pore sealing
Publication type
Journal article
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