Optimization and upscaling of spin coating with organosilane monolayers for low-k pore sealing

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Author(s)

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Romo Negreira, Ainhoa

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Meersschaut, Johan

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Conard, Thierry

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Struyf, Herbert

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Boemmels, Juergen

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Moinpour, Mansour

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De Feyter, Steven

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Journal

Microelectronic Engineering

Metrics

2003 since deposited on 2021-10-24

Acq. date: 2025-10-23