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CNT EUV pellicle:moving towards a full-size solution

dc.contributor.authorTimmermans, Marina
dc.contributor.authorPollentier, Ivan
dc.contributor.authorLee, Jae Uk
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorRichard, Olivier
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorGallagher, Emily
dc.date.accessioned2021-10-24T15:05:40Z
dc.date.available2021-10-24T15:05:40Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29585
dc.sourceIIOimport
dc.titleCNT EUV pellicle:moving towards a full-size solution
dc.typeProceedings paper
dc.contributor.imecauthorTimmermans, Marina
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorLee, Jae Uk
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorGallagher, Emily
dc.contributor.orcidimecTimmermans, Marina::0000-0001-9805-8259
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecLee, Jae Uk::0000-0002-9434-5055
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage104510P
dc.source.conferencePhotomask Technology
dc.source.conferencedate11/09/2017
dc.source.conferencelocationMonterey, CA USA
dc.identifier.urlhttp://spie.org/Publications/Proceedings/Paper/10.1117/12.2280632
imec.availabilityPublished - open access
imec.internalnotesProc. SPIE 10451, Photomask Technology, 104510P (16 October 2017); doi: 10.1117/12.2280632 Show Author Affiliations Proceedings of SPIE; Vol. 10451 Published in SPIE Proceedings Vol. 10451: Photomask Technology


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