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Etch process modules development and integration in 3D SOC applications

dc.contributor.authorTutunjyan, Nina
dc.contributor.authorSardo, Stefano
dc.contributor.authorDe Vos, Joeri
dc.contributor.authorVan Huylenbroeck, Stefaan
dc.contributor.authorJourdain, Anne
dc.contributor.authorPeng, Lan
dc.contributor.authorInoue, Fumihiro
dc.contributor.authorRassoul, Nouredine
dc.contributor.authorBeyer, Gerald
dc.contributor.authorBeyne, Eric
dc.contributor.authorMiller, Andy
dc.contributor.authorPiumi, Daniele
dc.contributor.authorWalsby, Edward
dc.contributor.authorAnsell, Oliver
dc.contributor.authorAshraf, Huma
dc.contributor.authorThomas, Dave
dc.date.accessioned2021-10-24T15:20:36Z
dc.date.available2021-10-24T15:20:36Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29608
dc.sourceIIOimport
dc.titleEtch process modules development and integration in 3D SOC applications
dc.typeMeeting abstract
dc.contributor.imecauthorTutunjyan, Nina
dc.contributor.imecauthorSardo, Stefano
dc.contributor.imecauthorDe Vos, Joeri
dc.contributor.imecauthorVan Huylenbroeck, Stefaan
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorPeng, Lan
dc.contributor.imecauthorInoue, Fumihiro
dc.contributor.imecauthorRassoul, Nouredine
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorBeyne, Eric
dc.contributor.imecauthorMiller, Andy
dc.contributor.imecauthorPiumi, Daniele
dc.contributor.imecauthorWalsby, Edward
dc.contributor.orcidimecSardo, Stefano::0000-0002-9302-8007
dc.contributor.orcidimecDe Vos, Joeri::0000-0002-9332-9336
dc.contributor.orcidimecVan Huylenbroeck, Stefaan::0000-0001-9978-3575
dc.contributor.orcidimecPeng, Lan::0000-0003-1824-126X
dc.contributor.orcidimecRassoul, Nouredine::0000-0001-9489-3396
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.source.peerreviewno
dc.source.conference10th International Workshop on Plasma Etch and Strip in Microtechnology - PESM
dc.source.conferencedate19/10/2017
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec


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