Publication:

Trends in scaling the Cu metallization

Date

2017

Meeting abstract

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Author(s)

van der Veen, Marleen

;

Jourdan, Nicolas

;

Vega Gonzalez, Victor

;

Vandersmissen, Kevin

;

;

Varela Pedreira, Olalla

;

Boemmels, Juergen

;

Struyf, Herbert

;

Statistics

1847 since deposited on 2021-10-24

Acq. date: 2026-02-25