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Trends in scaling the Cu metallization

dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorVega Gonzalez, Victor
dc.contributor.authorVandersmissen, Kevin
dc.contributor.authorWilson, Chris
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorStruyf, Herbert
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-24T15:55:57Z
dc.date.available2021-10-24T15:55:57Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29664
dc.sourceIIOimport
dc.titleTrends in scaling the Cu metallization
dc.typeMeeting abstract
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorVega Gonzalez, Victor
dc.contributor.imecauthorVandersmissen, Kevin
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.source.peerreviewyes
dc.source.conferenceMaterials for Advanced Metallization Conference
dc.source.conferencedate26/03/2017
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - imec


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