dc.contributor.author | Steegen, An | |
dc.contributor.author | Maex, Karen | |
dc.contributor.author | De Wolf, Ingrid | |
dc.date.accessioned | 2021-10-01T09:01:25Z | |
dc.date.available | 2021-10-01T09:01:25Z | |
dc.date.issued | 1998 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2974 | |
dc.source | IIOimport | |
dc.title | Local mechanical stress induced defects for Ti and Co/Ti silicidation in sub-0.25μm MOS-technologies | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Maex, Karen | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 200 | |
dc.source.endpage | 201 | |
dc.source.conference | IEEE VLSI Technology Symposium | |
dc.source.conferencedate | 9/06/1998 | |
dc.source.conferencelocation | Honolulu, HI USA | |
imec.availability | Published - imec | |