Authors

Vandooren, Anne; Witters, Liesbeth; Vecchio, Emma; Kunnen, Eddy; Hellings, Geert; Peng, Lan; Inoue, Fumihiro; Li, Waikin; Waldron, Niamh; Mocuta, Dan; Collaert, Nadine

Conference

IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference - IEEE S3S

Title

Double-gate Si junction-less n-type transistor for high performance Cu-BEOL compatible applications using 3D sequential integration

Publication type

Proceedings paper

Embargo date

9999-12-31