Publication:

Reliability study on cobalt and ruthenium as alternative metals for advance interconnects

Date

2017

Proceedings Paper

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Files

35599.pdf 735.46 KB

Author(s)

Varela Pedreira, Olalla

;

;

Lesniewska, Alicja

;

;

van der Veen, Marleen

;

De Messemaeker, Joke

;

Vandersmissen, Kevin

;

Jourdan, Nicolas

;

Wen, Liang Gong

;

Adelmann, Christoph

;

Briggs, Basoene

;

Vega Gonzalez, Victor

;

Boemmels, Juergen

;

Statistics

2009 since deposited on 2021-10-24

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Acq. date: 2026-10-12