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Reliability study on cobalt and ruthenium as alternative metals for advance interconnects

dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorCroes, Kristof
dc.contributor.authorLesniewska, Alicja
dc.contributor.authorWu, Chen
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorDe Messemaeker, Joke
dc.contributor.authorVandersmissen, Kevin
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorWen, Liang Gong
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorBriggs, Basoene
dc.contributor.authorVega Gonzalez, Victor
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-24T17:20:21Z
dc.date.available2021-10-24T17:20:21Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29795
dc.sourceIIOimport
dc.titleReliability study on cobalt and ruthenium as alternative metals for advance interconnects
dc.typeProceedings paper
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorLesniewska, Alicja
dc.contributor.imecauthorWu, Chen
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorDe Messemaeker, Joke
dc.contributor.imecauthorVandersmissen, Kevin
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorBriggs, Basoene
dc.contributor.imecauthorVega Gonzalez, Victor
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecLesniewska, Alicja::0000-0003-3863-065X
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage6B-2.1
dc.source.endpage6B-2.8
dc.source.conferenceIEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate2/04/2017
dc.source.conferencelocationMonterey, CA USA
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7936340/
imec.availabilityPublished - open access


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