dc.contributor.author | Vereecke, Guy | |
dc.contributor.author | De Coster, Hanne | |
dc.contributor.author | Carolan, Patrick | |
dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Willems, Kherim | |
dc.contributor.author | Ragnarsson, Lars-Ake | |
dc.contributor.author | Van Dorpe, Pol | |
dc.contributor.author | Horiguchi, Naoto | |
dc.contributor.author | Holsteyns, Frank | |
dc.date.accessioned | 2021-10-24T17:41:33Z | |
dc.date.available | 2021-10-24T17:41:33Z | |
dc.date.issued | 2017 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/29825 | |
dc.source | IIOimport | |
dc.title | Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Vereecke, Guy | |
dc.contributor.imecauthor | De Coster, Hanne | |
dc.contributor.imecauthor | Carolan, Patrick | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.contributor.imecauthor | Willems, Kherim | |
dc.contributor.imecauthor | Ragnarsson, Lars-Ake | |
dc.contributor.imecauthor | Van Dorpe, Pol | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.imecauthor | Holsteyns, Frank | |
dc.contributor.orcidimec | Vereecke, Guy::0000-0001-9058-9338 | |
dc.contributor.orcidimec | De Coster, Hanne::0000-0002-5968-7703 | |
dc.contributor.orcidimec | Carolan, Patrick::0000-0001-5931-3093 | |
dc.contributor.orcidimec | Willems, Kherim::0000-0003-1341-1581 | |
dc.contributor.orcidimec | Ragnarsson, Lars-Ake::0000-0003-1057-8140 | |
dc.contributor.orcidimec | Van Dorpe, Pol::0000-0003-0918-1664 | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 199 | |
dc.source.endpage | 209 | |
dc.source.conference | Surface Preparation and Cleaning Conference - SPCC | |
dc.source.conferencedate | 27/03/2017 | |
dc.source.conferencelocation | Austin, TX USA | |
dc.identifier.url | https://spcc2017.com/wp-content/uploads/2017/03/02-06-Vereecke-imec-Wet_etching_of_TiN_in_FinFET.pdf | |
imec.availability | Published - open access | |