Authors

Sugihara, Takashi; Van Roey, Frieda; Goethals, Mieke; Ronse, Kurt; Van den hove, Luc

Conference

MNE 98 - Micro- and Nano-Engineering Conference; 22-24 Sept. 1998; Leuven, Belgium.

Title

Resist surface investigations for reduction of line-edge-roughness in surface imaging technology

Publication type

Oral presentation