Authors

Wostyn, Kurt; Ragnarsson, Lars-Ake; Schram, Tom; Witters, Liesbeth; Conard, Thierry; Douhard, Bastien; Vanhaeren, Danielle; Holsteyns, Frank; Vandervorst, Wilfried; Horiguchi, Naoto

Conference

232nd ECS Fall Meeting - 15th International Symposium on Semiconductor Cleaning Science and Technology - SCST15

Title

The impact of dummy gate processing on Si-cap-free SiGe passivation: a physical characterization study on strained SiGe 25% and 45%

Publication type

Proceedings paper

Embargo date

9999-12-31