Towards an understanding of ion beam mixing by quantitative internal profiling

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Authors
Tian, Chunsheng; Gomez, Jose Ignacio; Beyer, Gerald; De Bisschop, Peter; Vandervorst, Wilfried; Wu, Ting-Di; D'Olieslaeger, Marc
Conference
SIMS XI - Secondary Ion Mass Spectrometry
Title
Towards an understanding of ion beam mixing by quantitative internal profiling
Publication type
Proceedings paper
Embargo date
9999-12-31
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