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Towards an understanding of ion beam mixing by quantitative internal profiling

dc.contributor.authorTian, Chunsheng
dc.contributor.authorGomez, Jose Ignacio
dc.contributor.authorBeyer, Gerald
dc.contributor.authorDe Bisschop, Peter
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorWu, Ting-Di
dc.contributor.authorD'Olieslaeger, Marc
dc.date.accessioned2021-10-01T09:06:07Z
dc.date.available2021-10-01T09:06:07Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2996
dc.sourceIIOimport
dc.titleTowards an understanding of ion beam mixing by quantitative internal profiling
dc.typeProceedings paper
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorDe Bisschop, Peter
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage351
dc.source.endpage354
dc.source.conferenceSIMS XI - Secondary Ion Mass Spectrometry
dc.source.conferencedate8/09/1997
dc.source.conferencelocationOrlando, FL USA
imec.availabilityPublished - open access


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