dc.contributor.author | Tian, Chunsheng | |
dc.contributor.author | Gomez, Jose Ignacio | |
dc.contributor.author | Beyer, Gerald | |
dc.contributor.author | De Bisschop, Peter | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Wu, Ting-Di | |
dc.contributor.author | D'Olieslaeger, Marc | |
dc.date.accessioned | 2021-10-01T09:06:07Z | |
dc.date.available | 2021-10-01T09:06:07Z | |
dc.date.issued | 1998 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2996 | |
dc.source | IIOimport | |
dc.title | Towards an understanding of ion beam mixing by quantitative internal profiling | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Beyer, Gerald | |
dc.contributor.imecauthor | De Bisschop, Peter | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | D'Olieslaeger, Marc | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 351 | |
dc.source.endpage | 354 | |
dc.source.conference | SIMS XI - Secondary Ion Mass Spectrometry | |
dc.source.conferencedate | 8/09/1997 | |
dc.source.conferencelocation | Orlando, FL USA | |
imec.availability | Published - open access | |