Power aware FinFET and lateral nanosheet FET targeting for 3nm CMOS technology

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Authors
Yakimets, Dmitry; Garcia Bardon, Marie; Jang, Doyoung; Schuddinck, Pieter; Sherazi, Yasser; Weckx, Pieter; Miyaguchi, Kenichi; Parvais, Bertrand; Raghavan, Praveen; Spessot, Alessio; Verkest, Diederik; Mocuta, Anda
Conference
IEEE International Electron Devices Meeting - IEDM
Title
Power aware FinFET and lateral nanosheet FET targeting for 3nm CMOS technology
Publication type
Proceedings paper
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