Browsing Book chapters by author "Baklanov, Mikhaïl"
Now showing items 1-10 of 10
-
Electrical reliability challenges of advanced low-k dielectrics
Wu, Chen; Li, Yunlong; Baklanov, Mikhaïl; Croes, Kristof (2016) -
Fractals in micro-and nanoelectronics
Arkhincheev, Valery; Baklanov, Mikhaïl (2011) -
Low dielectric constant materials for nanoelectronics
Baklanov, Mikhaïl; Vanstreels, Kris; Wu, Chen; Li, Yunlong; Croes, Kristof (2016) -
Nanoporous dielectric materials for advanced micro- and nanoelectronics
Baklanov, Mikhaïl (2012) -
Nondestructuve evaluation of critical properties of thin porous films
Baklanov, Mikhaïl; Shamiryan, Denis (2011) -
Plasma processing of low-k dielectrics
Shi, Hualiang; Shamiryan, Denis; de Marneffe, Jean-Francois; Huang, Huai; Ho, Paul; Baklanov, Mikhaïl (2012) -
Preface
Baklanov, Mikhaïl; Ho, Paul; Zschech, Ehrenfried (2012) -
Revealing the porous structure of low-k materials through solvent diffusion
Shamiryan, Denis; Baklanov, Mikhaïl; Maex, Karen (2005) -
Ultra-low-k by CVD: deposition and curing
Jousseaume, Vincent; Zenasni, Aziz; Gourhant, Olivier; Favennec, Laurent; Baklanov, Mikhaïl (2012) -
Wet clean applications in porous low-k patterning processes
Le, Quoc Toan; Vereecke, Guy; Struyf, Herbert; Kesters, Els; Baklanov, Mikhaïl (2012)