Browsing Book chapters by imec author "c6daff60182de3e0b1daea70be7fbdb667ec6cbe"
Now showing items 1-10 of 10
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Advanced material characterization by TOFSIMS in microelectronics
Conard, Thierry; Vandervorst, Wilfried (2005) -
FinFETs and their futures
Horiguchi, Naoto; Parvais, Bertrand; Chiarella, Thomas; Collaert, Nadine; Veloso, Anabela; Rooyackers, Rita; Verheyen, Peter; Witters, Liesbeth; Redolfi, Augusto; De Keersgieter, An; Brus, Stephan; Zschaetzsch, Gerd; Ercken, Monique; Altamirano Sanchez, Efrain; Locorotondo, Sabrina; Demand, Marc; Jurczak, Gosia; Vandervorst, Wilfried; Hoffmann, Thomas Y.; Biesemans, Serge (2011) -
Germanium deep-submicron p-FET and n-FET devices, fabricated on germanium-on-insulator substrates
Meuris, Marc; De Jaeger, Brice; Van Steenbergen, Jan; Bonzom, Renaud; Caymax, Matty; Houssa, Michel; Kaczer, Ben; Leys, Frederik; Martens, Koen; Opsomer, Karl; Pourghaderi, Mohammad Ali; Satta, Alessandra; Simoen, Eddy; Terzieva, Valentina; Van Moorhem, Els; Winderickx, Gillis; Loo, Roger; Clarysse, Trudo; Conard, Thierry; Delabie, Annelies; Hellin, David; Janssens, Tom; Onsia, Bart; Sioncke, Sonja; Mertens, Paul; Snow, Jim; Van Elshocht, Sven; Vandervorst, Wilfried; Zimmerman, Paul; Brunco, David; Raskin, G.; Letertre, F.; Akatsu, T.; Billon, T.; Heyns, Marc (2007) -
Mapping conductance and carrier distributions in confined three-dimensional transistor structures
Schulze, Andreas; Eyben, Pierre; Mody, Jay; Paredis, Kristof; Wouters, Lennaert; Celano, Umberto; Vandervorst, Wilfried (2019) -
Nanoscale three-dimensional characterization with scalpel SPM
Celano, Umberto; Vandervorst, Wilfried (2017) -
Physical characterization of ultra-thin high k dielectrics
Conard, Thierry; Bender, Hugo; Vandervorst, Wilfried (2007-02) -
Probing semiconductor technology and devices with scanning spreading resistance microscopy
Eyben, Pierre; Vandervorst, Wilfried; Alvarez, David; Xu, Mingwei; Fouchier, Marc (2007) -
Scanning Spreading Resistance Microscopy (SSRM): High resolution 2D and 3D carrier mapping of semiconductor nanostructures
Schulze, Andreas; Eyben, Pierre; Hantschel, Thomas; Vandervorst, Wilfried (2017) -
SIMS analysis on the transistor scale: probing composition and dopants in non-planar, confined 3D-volumes
Budrevich, Andre A.; Vandervorst, Wilfried (2017) -
Sub-nanometer characterization of nanoelectronic devices
Eyben, Pierre; Mody, Jay; Nazir, Aftab; Schulze, Andreas; Clarysse, Trudo; Hantschel, Thomas; Vandervorst, Wilfried (2013)