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SIMS analysis on the transistor scale: probing composition and dopants in non-planar, confined 3D-volumes
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1897 since deposited on 2021-10-24
7last month
Acq. date: 2026-08-27
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Statistics
Views
1897 since deposited on 2021-10-24
7last month
Acq. date: 2026-08-27
Citations