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SIMS analysis on the transistor scale: probing composition and dopants in non-planar, confined 3D-volumes
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1886 since deposited on 2021-10-24
3last month
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Acq. date: 2026-01-07
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1886 since deposited on 2021-10-24
3last month
2last week
Acq. date: 2026-01-07
Citations