Publication:
SIMS analysis on the transistor scale: probing composition and dopants in non-planar, confined 3D-volumes
Date
| dc.contributor.author | Budrevich, Andre A. | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-24T03:11:28Z | |
| dc.date.available | 2021-10-24T03:11:28Z | |
| dc.date.issued | 2017 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27938 | |
| dc.identifier.url | www.panstanford.com | |
| dc.source.beginpage | 153 | |
| dc.source.book | Metrology and diagnostic techniques for Nanoelectronics | |
| dc.source.endpage | 206 | |
| dc.title | SIMS analysis on the transistor scale: probing composition and dopants in non-planar, confined 3D-volumes | |
| dc.type | Book chapter | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |