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Process-oriented modelling of stresses and mechanical confinement in advanced nano-interconnects; implications for electromigration

dc.contributor.authorZahedmanesh, Houman
dc.contributor.authorCroes, Kristof
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-24T19:46:21Z
dc.date.available2021-10-24T19:46:21Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30002
dc.sourceIIOimport
dc.titleProcess-oriented modelling of stresses and mechanical confinement in advanced nano-interconnects; implications for electromigration
dc.typeMeeting abstract
dc.contributor.imecauthorZahedmanesh, Houman
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.source.peerreviewyes
dc.source.conferenceMaterials for Advanced Metallization Conference - MAM
dc.source.conferencedate20/03/2017
dc.source.conferencelocationDresden Germany
dc.identifier.urlhttp://www.mam-conf.org/content/dam/enas/mam-conf/en/MAM%202017%20Program.pdf
imec.availabilityPublished - imec


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