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Fundamental analysis of the collapse of nano-patterns during wet-processing of advanced interconnects

dc.contributor.authorZahedmanesh, Houman
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorVanstreels, Kris
dc.contributor.authorGonzalez, Mario
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-24T19:47:02Z
dc.date.available2021-10-24T19:47:02Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30003
dc.sourceIIOimport
dc.titleFundamental analysis of the collapse of nano-patterns during wet-processing of advanced interconnects
dc.typeOral presentation
dc.contributor.imecauthorZahedmanesh, Houman
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.source.peerreviewno
dc.source.conferenceMaterials for Advanced Metallization - MAM
dc.source.conferencedate20/03/2017
dc.source.conferencelocationDresden Germay
dc.identifier.urlhttp://www.mam-conf.org/en/conference-program/postersession.html
imec.availabilityPublished - imec


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