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Mechanisms for plasma cryogenic etching of porous materials
Publication:
Mechanisms for plasma cryogenic etching of porous materials
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Date
2017
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhang, Quan-Zi
;
Tinck, Stefan
;
de Marneffe, Jean-Francois
;
Zhang, Liping
;
Bogaerts, Annemie
Journal
Applied Physics Letters
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1877
since deposited on 2021-10-24
Acq. date: 2026-02-25
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Statistics
Views
1877
since deposited on 2021-10-24
Acq. date: 2026-02-25
Citations