Corrosion of Co in BEOL interconnects in dilute HF solution

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Authors
Akanishi, Yuya; Kesters, Els; Le, Quoc Toan; Holsteyns, Frank
Conference
Ultra Clean Processing of Semiconductor Surfaces XIV - UCPSS
Title
Corrosion of Co in BEOL interconnects in dilute HF solution
Publication type
Proceedings paper
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