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Corrosion of Co in BEOL interconnects in dilute HF solution

dc.contributor.authorAkanishi, Yuya
dc.contributor.authorKesters, Els
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorHolsteyns, Frank
dc.date.accessioned2021-10-25T16:31:29Z
dc.date.available2021-10-25T16:31:29Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30091
dc.sourceIIOimport
dc.titleCorrosion of Co in BEOL interconnects in dilute HF solution
dc.typeProceedings paper
dc.contributor.imecauthorAkanishi, Yuya
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.source.peerreviewyes
dc.source.beginpage256
dc.source.endpage262
dc.source.conferenceUltra Clean Processing of Semiconductor Surfaces XIV - UCPSS
dc.source.conferencedate2/09/2018
dc.source.conferencelocationLeuven Belgium
dc.identifier.urlhttps://www.scientific.net/SSP.282.256
imec.availabilityPublished - imec
imec.internalnotesSolid State Phenomena; Vol. 282


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