Publication:
Self-aligned fin cut last patterning scheme for fin arrays of 24nm pitch and beyond
Date
Loading...
Journal
Abstract
Description
Statistics
Views
2086 since deposited on 2021-10-25
2last month
2last week
Acq. date: 2026-04-26
Citations
Statistics
Views
2086 since deposited on 2021-10-25
2last month
2last week
Acq. date: 2026-04-26
Citations