dc.contributor.author | Busby, Yan | |
dc.contributor.author | Noel, Celine | |
dc.contributor.author | Franquet, Alexis | |
dc.contributor.author | Spampinato, Valentina | |
dc.contributor.author | Felten, Alexandre | |
dc.contributor.author | Houssiau, Laurent | |
dc.date.accessioned | 2021-10-25T17:00:09Z | |
dc.date.available | 2021-10-25T17:00:09Z | |
dc.date.issued | 2018 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/30346 | |
dc.source | IIOimport | |
dc.title | Depth profiling intrinsically hybrid layers and organic/inorganic stacks by variable-size argon clusters: a ToF-SIMS and XPS study | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Noel, Celine | |
dc.contributor.imecauthor | Franquet, Alexis | |
dc.contributor.imecauthor | Spampinato, Valentina | |
dc.contributor.orcidimec | Noel, Celine::0000-0002-3000-8914 | |
dc.contributor.orcidimec | Franquet, Alexis::0000-0002-7371-8852 | |
dc.contributor.orcidimec | Spampinato, Valentina::0000-0003-3225-6740 | |
dc.source.peerreview | yes | |
dc.source.conference | SIMS Europe 2018 | |
dc.source.conferencedate | 16/09/2018 | |
dc.source.conferencelocation | Münster Germany | |
imec.availability | Published - imec | |