Publication:
Low damage ultra-low-k patterning using a high boiling point organic (HBPO) combined with NF3
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1893 since deposited on 2021-10-25
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Acq. date: 2026-02-25
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Views
1893 since deposited on 2021-10-25
2last month
1last week
Acq. date: 2026-02-25
Citations