Are extended defects a show stopper for future III-V CMOS technologies?

Thumbnail
Metadata
Show full item record
Authors
Claeys, Cor; Hsu, Brent; He, Liang; Mols, Yves; Kunert, Bernardette; Langer, Robert; Waldron, Niamh; Eneman, Geert; Collaert, Nadine; Heyns, Marc; Simoen, Eddy
Conference
19th International Conference on Extended Defects in Semiconductors - EDS
Title
Are extended defects a show stopper for future III-V CMOS technologies?
Publication type
Proceedings paper
Collections