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Gas-phase pore stuffing for low-damage patterning of organo-silicate glass dielectric materials

dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorFujikawa, T.M.
dc.contributor.authorYamaguchi, T.
dc.contributor.authorNozawa, S.
dc.contributor.authorNiino, R.
dc.contributor.authorSato, N.
dc.contributor.authorChanson, R.
dc.contributor.authorBabaei Gavan, Khashayar
dc.contributor.authorRezvanov, Askar
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-25T17:44:42Z
dc.date.available2021-10-25T17:44:42Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30534
dc.sourceIIOimport
dc.titleGas-phase pore stuffing for low-damage patterning of organo-silicate glass dielectric materials
dc.typeMeeting abstract
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorBabaei Gavan, Khashayar
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpagePSM-WeA9
dc.source.conferenceAVS 65th Meeting & Exhibition 2018
dc.source.conferencedate21/10/2018
dc.source.conferencelocationLong Beach, CA USA
dc.identifier.urlhttps://www2.avs.org/symposium2018/ProgramBooks/ProgramBook_Session_PS+EM-WeA.pdf
imec.availabilityPublished - open access


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