Determining Si composition in SiGe alloys with <1% Si concentrations using Raman spectroscopy

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Authors
De Wolf, Ingrid; Simons, Veerle; Srinivasan, Ashwyn; Verheyen, Peter; Loo, Roger
Conference
2018 AiMES ECS International Meeting
Title
Determining Si composition in SiGe alloys with <1% Si concentrations using Raman spectroscopy
Publication type
Meeting abstract
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