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Determining Si composition in SiGe alloys with <1% Si concentrations using Raman spectroscopy

dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorSimons, Veerle
dc.contributor.authorSrinivasan, Ashwyn
dc.contributor.authorVerheyen, Peter
dc.contributor.authorLoo, Roger
dc.date.accessioned2021-10-25T17:54:03Z
dc.date.available2021-10-25T17:54:03Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30568
dc.sourceIIOimport
dc.titleDetermining Si composition in SiGe alloys with <1% Si concentrations using Raman spectroscopy
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorSimons, Veerle
dc.contributor.imecauthorSrinivasan, Ashwyn
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecSimons, Veerle::0000-0001-5714-955X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage397
dc.source.endpage407
dc.source.conferenceSiGe, Ge, and Related Materials: Materials, Processing, and Devices 8
dc.source.conferencedate30/09/2018
dc.source.conferencelocationCancun Mexico
dc.identifier.urlhttp://ecst.ecsdl.org/content/86/7/397.abstract
imec.availabilityPublished - open access
imec.internalnotesECS Transactions; Vol. 86, Issue 7


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