Characterization of TaCl5-based ALD TaN films in metal gate stacks

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Authors

Dekkers, Harold; Ragnarsson, Lars-Ake; Schram, Tom; Horiguchi, Naoto

ISSN

0021-8979

Issue

16

Journal

Journal of Applied Physics

Volume

124

Title

Characterization of TaCl5-based ALD TaN films in metal gate stacks

Publication type

Journal article

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