First demonstration of monocrystalline silicon macaroni channel for 3-D NAND memory devices

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Authors
Delhougne, Romain; Arreghini, Antonio; Rosseel, Erik; Hikavyy, Andriy; Vecchio, Emma; Zhang, Liping; Pak, Murat; Nyns, Laura; Raymaekers, Tom; Jossart, Nico; Breuil, Laurent; Vadakupudhu Palayam, Senthil; Tan, ChiLim; Van den Bosch, Geert; Furnemont, Arnaud
Conference
IEEE Symposium on VLSI Technology
Title
First demonstration of monocrystalline silicon macaroni channel for 3-D NAND memory devices
Publication type
Proceedings paper
Embargo date
9999-12-31
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