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Towards carrier profiling in nanometer-wide Si fins with micro four-point probe

dc.contributor.authorFolkersma, Steven
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorSchulze, Andreas
dc.contributor.authorFavia, Paola
dc.contributor.authorFranquet, Alexis
dc.contributor.authorSpampinato, Valentina
dc.contributor.authorPetersen, Dirch H.
dc.contributor.authorHansen, Ole
dc.contributor.authorHenrichsen, Henrik H.
dc.contributor.authorNielsen, Peter F.
dc.contributor.authorShiv, Lior
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-25T18:43:40Z
dc.date.available2021-10-25T18:43:40Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30720
dc.sourceIIOimport
dc.titleTowards carrier profiling in nanometer-wide Si fins with micro four-point probe
dc.typeProceedings paper
dc.contributor.imecauthorFolkersma, Steven
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage3
dc.source.conference2018 22nd International Conference on Ion Implantation Technology (IIT)
dc.source.conferencedate16/09/2018
dc.source.conferencelocationWurzburg Germany
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8807934
imec.availabilityPublished - imec


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