Towards carrier profiling in nanometer-wide Si fins with micro four-point probe

Thumbnail
Metadata
Show full item record
Authors
Folkersma, Steven; Bogdanowicz, Janusz; Schulze, Andreas; Favia, Paola; Franquet, Alexis; Spampinato, Valentina; Petersen, Dirch H.; Hansen, Ole; Henrichsen, Henrik H.; Nielsen, Peter F.; Shiv, Lior; Vandervorst, Wilfried
Conference
2018 22nd International Conference on Ion Implantation Technology (IIT)
Title
Towards carrier profiling in nanometer-wide Si fins with micro four-point probe
Publication type
Proceedings paper
Collections