Towards carrier profiling in nanometer-wide Si fins with micro four-point probe

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Author(s)

Folkersma, Steven

;

Bogdanowicz, Janusz

;

Schulze, Andreas

;

;

Franquet, Alexis

;

Spampinato, Valentina

;

Petersen, Dirch H.

;

;

Henrichsen, Henrik H.

;

Nielsen, Peter F.

;

;

Vandervorst, Wilfried

Metrics

1954 since deposited on 2021-10-25

Acq. date: 2025-10-23