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Towards carrier profiling in nanometer-wide Si fins with micro four-point probe

Date

2018
Proceedings Paper
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dc.contributor.authorFolkersma, Steven
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorSchulze, Andreas
dc.contributor.authorFavia, Paola
dc.contributor.authorFranquet, Alexis
dc.contributor.authorSpampinato, Valentina
dc.contributor.authorPetersen, Dirch H.
dc.contributor.authorHansen, Ole
dc.contributor.authorHenrichsen, Henrik H.
dc.contributor.authorNielsen, Peter F.
dc.contributor.authorShiv, Lior
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorFolkersma, Steven
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.date.accessioned2021-10-25T18:43:40Z
dc.date.available2021-10-25T18:43:40Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30720
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8807934
dc.source.beginpage1
dc.source.conference2018 22nd International Conference on Ion Implantation Technology (IIT)
dc.source.conferencedate16/09/2018
dc.source.conferencelocationWurzburg Germany
dc.source.endpage3
dc.title

Towards carrier profiling in nanometer-wide Si fins with micro four-point probe

dc.typeProceedings paper
dspace.entity.typePublication
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