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Zero and one-dimensional electrical characterization of nanometer-wide Si fins

dc.contributor.authorFolkersma, Steven
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorSchulze, Andreas
dc.contributor.authorFavia, Paola
dc.contributor.authorFranquet, Alexis
dc.contributor.authorSpampinato, Valentina
dc.contributor.authorPetersen, Dirch
dc.contributor.authorHansen, Ole
dc.contributor.authorHenrichsen, Henrik
dc.contributor.authorNielsen, Peter
dc.contributor.authorShiv, Lior
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-25T18:44:04Z
dc.date.available2021-10-25T18:44:04Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30721
dc.sourceIIOimport
dc.titleZero and one-dimensional electrical characterization of nanometer-wide Si fins
dc.typeMeeting abstract
dc.contributor.imecauthorFolkersma, Steven
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.source.peerreviewyes
dc.source.conference22nd International Conference on Ion Implantation Technology - IIT
dc.source.conferencedate16/09/2018
dc.source.conferencelocationWurzburg Germany
dc.identifier.urlhttps://www.iit2018.org/content/dam/iisb/iit2018/documents/2018-08-06-program-iit-2018.pdf
imec.availabilityPublished - imec


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